1. PlasmaÀÇ ±âÃÊ À̷аú ¿ø¸®
(3,000¿ø, 19Page)
±âº»Æú´õ | 2008/07/25 15:42 |
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| 1. History of plasma and discharge 1750³â´ë: Benjamin Frankiln ÀÌLeyden º´À»ÀÌ¿ëÇÏ¿©¡°¹ø°³´ÂÀü±âÇö»óÀÌ´Ù.¡±¶ó´Â°ÍÀ»¹àÈûÃÖÃÊÀǹæÀü¿¡°üÇÑÇй®À½Àü±â¿Í¾çÀü±âµîÀǰ³³äÀ»µµÀÔ¹ø°³¸¦ÇÇÇϱâÀ§ÇÑÇÇ·ÚħÀ»°í¾ÈÃÖÃÊÀÇÀü±â°øÇÐÀÚ19¼¼±â: ¹æÀü¿¡°üÇѺ»°ÝÀûÀבּ¸µéÀÌÁøÇàµÇ±â½ÃÀÛ(M.. | |||
| ÅÂ±× : Plasma, ÀüÀÚ, ÇöóÁ | |||
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2. Thermal Oxidation -Furnace
(3,500¿ø, 23Page)
±âº»Æú´õ | 2008/07/25 15:28 |
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| 1. Type of Oxidation oxidation»êȸ·Çü¼ºÀº½Ç¸®ÄÜÁýÀûȸ·ÎÁ¦ÀÛ¿¡¼°¡Àå±âº»ÀûÀ̸çÀÚÁÖ»ç¿ëµÇ´Â°øÁ¤ ¹ÝµµÃ¼¼ÒÀÚ¿¡¼¸Å¿ì¿ì¼öÇÑÀý¿¬Ã¼(insulator)·ÎÀü·ù¿ÍµµÇι°Áú(dopant)ÀÇÀ̵¿À»¸·´Âµ¥»ç¿ë 2. Classification of Oxidation - Temperature T < 200 ¡É : anodization : eth.. | |||
| ÅÂ±× : Thermal Oxidation, Furnace, ¿»êȸ·, ¿»êȹý | |||
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3. Electroless nickle-phosphorus plating on SiCP/..
(2,500¿ø, 18Page)
±âº»Æú´õ | 2008/07/25 12:27 |
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| Electroless and History 1940³â´ë ; - ¹Ì±¹ÀÇ A.brenner¿Í G.riddel¿¡ ÀÇÇØ ¹«ÀüÇØ ´ÏÄÌÀ» ¹ß¸í - ´ÏÄ̰ú ÅÖ½ºÅÙ ÇÕ±Ý µµ±ÝÀ» ¿¬±¸ÇÏ´ø Áß ¿ì¿¬È÷ Â÷¾ÆÀλ꿰À» ÷°¡ - Ä¡¾ÆÀλ꿰ÀÇ Àü·ùÈ¿À²ÀÌ 120% ÀÌ»ó ³ª¿À°í ÈÇÐÀûÀ¸·Î ȯ¿øÈ¿°ú°¡ ÀÖ.. | |||
| ÅÂ±× : ¹«ÀüÇØ µµ±Ý, electroless plating, µµ±Ý | |||
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4. Stress Changes of Nanocrystalline CoNi Films E..
(2,500¿ø, 10Page)
±âº»Æú´õ | 2008/07/25 11:47 |
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| Recent Applications ULSI Application Copper Metallization : IBM 1997 Replace aluminum Interconnects with copper MEMS Application LIGA (or LIGA- like process): 1990 Fabrication Microstructure by Electroforming RF MEMS, Bio MEMS Fa.. | |||
| ÅÂ±× : µµ±Ý, ÀüÇØ µµ±Ý, Electroplating, Electrodeposition | |||
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5. ¹«ÀüÇØ ´ÏÄÌ µµ±Ý ±â¼ú
(2,500¿ø, 16Page)
±âº»Æú´õ | 2008/07/25 11:37 |
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| ¿åÀÇ Æ¯Â¡ ¼®Ãâ¹°ÀÇ Æ¯Â¡ ºñ°í Â÷¾ÆÀÎ»ê ³ªÆ®·ý »ê¼º¿å(pH4~6) ¿Âµµ(85~90¡É) µµ±Ý¼Óµµ°¡ ºü¸§ (12~25um/h) ÀÎ(8~12%),ºñÀÚ¼º °í°æµµ(Hv 1,000) ³»¸¶¸ð¼º ³»½Ä¼º °ø¾÷ÀûÀ¸·Î °¡Àå ³Î¸® »ç¿ë ¾Ï¸ð´Ï¾Æ ¾ËÄ«¸®¿å (pH 8~10) ¿Âµµ(25~50¡É) µµ±Ý¼Óµµ(1~8um/h) ÀÎ(3~.. | |||
| ÅÂ±× : Electroless plating, Electroless depositi, ¹«ÀüÇØ µµ±Ý, ¹«ÀüÇØ ´ÏÄÌ µµ±Ý | |||
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